Magnus Vejby Nielsen
Technical University of Denmark, DK

Wednesday, March 25
10:00
Abstract
Precision Grayscale Pattern Transfer in van der Waals Crystals
Thermal scanning-probe lithography is an excellent tool for fabricating high-precision
surfaces in various nanoscale applications. Experiments often require the transfer of surface
patterns from a polymer resist to another material of interest, which can distort the initial
topographic profile. Here, we report a simple and reproducible procedure to transfer
grayscale surface patterns to stacks of two-dimensional crystals, based on the reactive ion
etching of a single polyphthalaldehyde layer. We employ quantitative pattern analysis which
allows for extracting empirical transfer functions from a grayscale map to post-etch
topography, which we exploit to achieve high-precision pattern transfer in van der Waals
heterostructures.
Biography
Sander Jæger Linde and Magnus Vejby Nielsen are currently master’s students at
the Technical University of Denmark (DTU). They obtained their Bachelor’s degrees in
Physics and Nanotechnology from DTU, where they were introduced to the field of 2D
materials and thermal scanning probe lithography (t-SPL), through their joint bachelor thesis.
The fruits of this thesis led directly to the paper “Fourier-Tailored Light–Matter Coupling in
van der Waals Heterostructures”, and indirectly to the development of FunFit – an AFM
image analysis tool aimed at quantifying fidelity of nanoscale grayscale lithography
topographies. At the 9th Thermal Probe Workshop, Sander and Magnus received the best
poster award for FunFit.